Due to an increasing attention to smart phones and energy saving, the MEMS market is expected to expand greatly in these years. Photomasks for MEMS have some different characteristics from those of semiconductors, such as large substrates and other irregular forms. NIPPON FILCON CO., LTD. has an edge on such patterning.
Gyro sensors / Acceleration sensors / Pressure sensors / Angle sensors / Probe cards / Inkjet printer heads / HDD magnetic heads / CCD, CMOS sensors / SAW filters / Crystal devices / Noise filters / etc.
- Our high performance laser writing machines enable highly accurate slanted lines and circles.
- We have an abundance of delivery records to leading MEMS makers.
- NIPPON FILCON provides 7.25R and 9inch masks with our world-class precise devices used for semiconductors.
- Our skillful engineers always welcome customer's problems and make utmost efforts to find the best solutions.
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| Substrate | Material | Magnification ratio | Applicable device |
|---|---|---|---|
| 7×7×0.12inch | Quartz or Soda lime |
1× | SUSS, EVG, UNION OPTICAL, USHIO, AZORES, Ultratech, etc. |
| 7.25R×0.15inch | |||
| 9×9×0.12/0.2inch |
Other various substrates can also be accommodated
| Minimum Dimension | Guaranteed minimum dimension | Positioning accuracy | Guaranteed defect accuracy |
|---|---|---|---|
| 1µm | ±0.1µm | ±0.1µm ~ | 0.1def. sq cm, 1µm or bigger. |
