Production Steps

FILCON PHOTOMASK

NIPPON FILCON's long time expertise and technology guarantee high quality and high throughput.

Photomask production steps

There are CAD, drawing and processing, inspection & measurement cleaning , pellicle processing steps.

Photomask production steps
  1. Photomask production starts after receiving and checking the CAD data and the specification received.
  2. After drawing check in CAD process, we send the check data in PDF or other formats to the customer for confirmation.
  3. After the customer's approval, it goes on to the production line; reticle/ master drawing process or copy printing process.
  4. Through the processing step, it goes through development, etching, photo resist removal, cleaning and drying processes.
  5. Pattern measurement and cosmetic inspection.
  6. Some of reticles directly go to cleaning step without attaching pellicles. Master and copy masks all go to cleaning step.
  7. After applying a pellicle, check if there are any foreign particulars.
  8. Final inspections for check items including the specification, criteria, surface.
  9. Packing and shipping
Call NIPPON FILCON Photomask Sales Team for any inquiry +81-44-378-4141 (Operating Hours 9 - 18 Japan time, Closed on Saturdays, Sundays and National Holidays)
  • Online Inquires Inquiry Form

We care about quality. Chose NIPPON FILCON photomasks, copy masks, large masks up to 800mm×920mm.

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