Introduction to photomasks for MEMES and Gyro sensors

FILCON PHOTOMASK

MEMS. Electronic parts

MEMS. Electronic parts

Due to an increasing attention to smart phones and energy saving, the MEMS market is expected to expand greatly in these years. Photomasks for MEMS have some different characteristics from those of semiconductors, such as large substrates and other irregular forms. NIPPON FILCON CO., LTD. has an edge on such patterning.

Applicable devices

Gyro sensors / Acceleration sensors / Pressure sensors / Angle sensors / Probe cards / Inkjet printer heads / HDD magnetic heads / CCD, CMOS sensors / SAW filters / Crystal devices / Noise filters / etc.

Why choose NIPPON FILCON CO., LTD?

  • Our high performance laser writing machines enable highly accurate slanted lines and circles.
  • We have an abundance of delivery records to leading MEMS makers.
  • NIPPON FILCON provides 7.25R and 9inch masks with our world-class precise devices used for semiconductors.
  • Our skillful engineers always welcome customer's problems and make utmost efforts to find the best solutions.
MEMS image

Our company logo
Please see
the smooth curb lines
and sharp tipping points.

Click the image.

Standard of photomasks

Substrate Material Magnification ratio Applicable device
7×7×0.12inch Quartz
or
Soda lime
SUSS, EVG, UNION OPTICAL, USHIO, AZORES, Ultratech, etc.
7.25R×0.15inch
9×9×0.12/0.2inch

Other various substrates can also be accommodated

Minimum Dimension Guaranteed minimum dimension Positioning accuracy Guaranteed defect accuracy
1µm ±0.1µm ±0.1µm ~ 0.1def. sq cm, 1µm
or bigger.
Call NIPPON FILCON Photomask Sales Team for any inquiry +81-44-378-4141 (Operating Hours 9 - 18 Japan time, Closed on Saturdays, Sundays and National Holidays)
  • Online Inquires Inquiry Form
  • Photomask Quotation Request Form New User Registration

Please contact NIPPON FILCON CO.,LTD for photomasks for MEMS and Gyro sensors.

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