Compact terminal devices such as smart phones, tablets are now "must have "items in our lives. Our photomasks are used for TFT-LCDs, AMOLED (organic EL), and touch panels.
These devices require very delicate patterning. Our writing machines enable manufacturing photomasks with even and smooth patterns accurately positioned.
Compact, medium size TFT –LCD panels/ Organic EL displays/ Electronic paper/Capacitance touch panels/etc
Substrate | Material | Magnification Ratio | Applicable device |
---|---|---|---|
6×6×0.25inch | Quartz | 1×, 2×, 2.5×, 4×, 5× | Canon, Nikon, ASML etc. |
Other various substrates can also be accommodated.
Minimum Dimension | Guaranteed minimum dimension | Positioning accuracy | Guaranteed defect accuracy |
---|---|---|---|
0.5µm | ±0.05µm | ±0.05µm ~ | 0 def. sq cm, 0.2µm or bigger. |